Figure 1. Fabrication of the film-type proximity sensor.

(a) Schematic diagramme of the structure of our novel film-type proximity sensor. (b–e) Fabrication procedure of the proximity sensor: Screen printing a circular-shaped bottom Ag electrode on a silicone blanket (b), pressing a PET film onto the blanket (c), printing a circular top electrode at the top of the film using another screen mask (d), and peeling the film off the blanket, followed by thermal treatment (e). (f) An example of the sensor patterns formed by the above-mentioned procedure.