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. 2016 Jan 21;6:19426. doi: 10.1038/srep19426

Figure 8. Processing steps of the cantilevers:

Figure 8

(a) PEN substrate, (b) bottom electrode patterning, (c) PVDF-TrFE spin-coating and annealing, (d) top electrode patterning, (e) cutting of the cantilever shape, (f) final structure.