Figure 5. Plasma sheath potential distribution of AAO with and without spacer.

Schematic illustrations of the plasma sheath formation on AAO directly sitting on top of (a) a metal stage and (b) a dielectric spacer on the metal stage, respectively. (c) Potential distributions as a function of distance away from the metal stage directly (dashed lines) and from the dielectric on the stage (solid lines) at different bias voltage.