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. 2016 Jan 29;6:19719. doi: 10.1038/srep19719

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(a) Scanning electron microscope (SEM) image of local functionalization of graphene (100 μm × 100 μm) with ion doses of 10¹³ ions/cm² and simultaneous 167 s gas exposure. (b) Scanning tunneling microscopy image of DG under the same ion dosage. (c) X-ray photoelectron spectroscopy spectra of F 1 s peak of pristine graphene, DG and FG. FG reveals a distinguished F 1 s peak, and the F 1 s spectrum of pristine graphene as well as DG is given as a reference. (d) Raman comparison of pristine graphene, DG and FG. Lower I_D/I_G in FG in contrast to DG indicates lower degree of defects density and larger crystalline size.