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Geometric parameters used in the simulations.
| Case-A | Case-B | Case-C | |
|---|---|---|---|
| (cm) | 1.0 | 1.0 | 1.0 |
| wchip (mm) | 3.42 | 3.42 | 3.42 |
| hchip (mm) | 2.0 | 2.0 | 2.0 |
| wglass (mm) | 3.42 | 5.42 | 3.42 |
| hglass (mm) | 1.0 | 1.0 | 1.0 |
| hpiezo (mm) | … | 1.0 | 1.0 |
| wpiezo (mm) | … | 3.0 | 3.0 |
| Lpiezo (mm) | … | 1.0 | 1.0 |
| hchan (μm) | 120 | 120 | 120 |
| wchan (μm) | 330 | 330 | 330 |
