TABLE II.
Diagnostics | Arrival timing monitor | Dispersive spectrometer | |
---|---|---|---|
X-ray branch | −1st order | +1st order | |
Reflection geometry | Horizontal | Vertical | Vertical |
Abbreviation | M1 | M3 | M2 |
Surface profile | Flat | Elliptical cylinder | Elliptical cylinder |
Substrate material | Si | SiO2 | SiO2 |
Surface coating | Rh | Rh | |
Effective length (mm) | 390 | 408 | 90 |
Substrate size (mm3) | 400 × 50 × 50 | 420 × 50 × 50 | 100 × 50 × 15 |
Glancing angle (mrad) | 3 | 1.55 | 2.7 |
Spatial acceptance (mm) | 1.17 | 0.63 | 0.243 |
Focal length (m) | 2 | 0.085 | |
Groove size (mm3) (L × W × D) | 400 × 10 × 5 | 420 × 10 × 5 |