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. 2016 Jan 1;23(Pt 1):50–58. doi: 10.1107/S1600577515020901

Table 2. Microroughness values of uncoated and B4C coated sapphire substrates.

Values measured by white-light interferometry (WLI) and atomic force microscopy (AFM) at HZB.

Magnification   Uncoated sapphire B4C coating
WLI 20× S q 0.35–0.42 (nm) r.m.s. 0.33–0.47 (nm) r.m.s.
WLI 40× S q 0.18–0.26 (nm) r.m.s. 0.20–0.26 (nm) r.m.s.
AFM 15 × 15 (µm) S q 0.12 (nm) r.m.s. 0.10 (nm) r.m.s.