Table 2. Parameters of the focusing mirrors of the beamline.
| Optical element | M1 | M3 | M4 |
|---|---|---|---|
| Shape | Toroidal | Cylindrical | Toroidal |
| Surface size (L × W) (mm) | 1000 × 60 | 1000 × 60 | 350 × 30 |
| Substrate | Si | Si | Si |
| Coating (thickness) (nm) | Au (40) | Au (40) | Au (40) |
| Tangential radius R (mm) | 339578 | 194000 | 82725 |
| Sagittal radius ρ (mm) | 1040.3 | 470.3 | 52.8 |
| Grazing incidence angle (°) | 2° | 2° | 2° |
| Source distance (h / v) (mm) | 15000 | – / ∞ | 2975 / 1036 |
| Focus distance (h / v) (mm) | 9795 / ∞ | – / 6734 | 2800 |
| Roughness σ (nm r.m.s.) | 0.25 | 0.23 | 0.25 |
| Slope error (tangential / sagittal) (µrad r.m.s.) | 0.85 / 3.25 | 0.9 / 3.5 | 1.5 / 5.0 |