Table 3. Parameters of the SX700 monochromator optics.

Optical element	PG1	PG2	M2
Shape	Plane grating	Plane grating	Plane mirror
Optical surface size (L × W) (mm)	120 × 40	120 × 40	600 × 40
Substrate	Si	Si	Zerodur
Coating (thickness) (nm)	Au (40)	Au (40)	Au (40)
Tangential radius (km)	95	94	>300
Line density (lines mm−1)	1200	600	–
Blaze angle (°)	1.1°	2°	–
Grazing incidence angle (°)	1–24°	1–24°	1.5–13°
Roughness σ (nm r.m.s.)	0.3	0.6	0.5
Slope error (µrad r.m.s.)	0.2	0.3	0.3