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. 2016 Jan 22;7:10518. doi: 10.1038/ncomms10518

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(a–c) Circular template. (a) The HSQ EBL template. (b) The SD45 BCP cylinders are templated by the PDMS-functionalized HSQ circles to form concentric rings. (c) Circular nanomesh pattern from SD16 over SD45. (d–f) Y-junction template. (d) The sacrificial PMMA EBL template. (e) The SD45 BCP cylinders are templated by the PMMA pattern to form three-direction arrays of cylinders with a central intersection. The PMMA template was removed during the etching process. (f) A Y-junction nanomesh pattern from SD16 over SD45. Scale bars, 500 nm.