Table 1.

Parameters of TSM Resonator (30)

Density of quartz	ρq	2.651 × 103 kg⋅m−3
Shear stiffness of quartz	cq= c66 + e226/ε22 + jωηq	2.970 × 1010 N⋅m−2 + jωηq
Piezoelectric constant of quartz	eq= e26	9.657 × 10−2 A⋅s⋅m−2
Dielectric permittivity of quartz	εq= ε22	3.982 × 10−11 A2⋅s4⋅kg−1⋅m−3
Surface area of TSM resonator	A	2.047 × 10−5 m2
Thickness of TSM resonator	hq (theoretical)	165 μm