Fig. 6.

Accuracy of structural properties predicted from the FDTD-generated SM signal (a) ${\sigma }_{n_{\mathrm{\Delta }}}$ predictions from wavelength-resolved reflectance measurements simulated by FDTD for samples with varying ${\sigma }_{n_{\mathrm{\Delta }}}$, $l_c=100\mathrm{nm}$, and $L=2\mu \mathrm{m}$. (b) ${\sigma }_{n_{\mathrm{\Delta }}}$ and (c) $l_c$ predictions from samples with varying RI correlation lengths $l_c$, ${\sigma }_{n_{\mathrm{\Delta }}}=0.033$, and $L=3\mu \mathrm{m}$, and (d) the corresponding percentage of error in calculation of ${\sigma }_{n_{\mathrm{\Delta }}}$, $l_c$, and $L$ from the generated reflectance spectra.