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. 2016 Feb 17;6:21020. doi: 10.1038/srep21020

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(Left) Horizontal EDX line scans with corresponding elements profiles labeled as (a,b) in Fig. 3(a); (Right) Horizontal EDX line scans with corresponding elements profiles labeled as (c,d) in Fig. 3(b). EDX analysis of elements profile further confirms the switching region in the proposed SEO structure is totally isolated by Si₃N₄ layer.