Table 1. Parameters used in plasma ion immersion implantation (PIII).
| Target | Cathodic arc | |
|---|---|---|
| Voltage pulse duration (μs) | 500 | 500 |
| Pulsing frequency (Hz) | 7 | 7 |
| Ion implantation voltage (kV) | −30 | / |
| Ion implantation time (h) | 1.5 | / |
| Pressure (Pa) | 5 × 10−3 | / |
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