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. 2016 Feb 23;6:21869. doi: 10.1038/srep21869

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Copyright © 2016, Macmillan Publishers Limited

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Variation of the (a) real refractive index, (b) C (1s) spectra and (c) O (1s) spectra of non-activated, only-thermal, SUT (in N₂) and SUT (in air) activated IGZO films obtained using SE, XPS, and XAS analyses, respectively.