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. 2016 Feb 23;6:21869. doi: 10.1038/srep21869

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Variation of the O (1s) spectra of IGZO films after various activations: (a) Non-activated, (b) only-thermal, (c) SUT (in N₂) and (d) SUT (in air). (d) Comparison of the peak area percentages for M–O, V_o, and hydroxyl groups from the deconvolution of the O (1s) spectra.