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. 2016 Feb 24;6:21738. doi: 10.1038/srep21738

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Copyright © 2016, Macmillan Publishers Limited

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(a) Electron diffraction patterns of (i) the monocrystalline silicon substrate and (ii) the fabricated silicon needle. Twelve vortex pulses were then overlaid. (b) Spatial distribution of the lattice index in the fabricated silicon needle. The cross section of the needle exhibits a lattice index (101). Twelve vortex pulses were then overlaid. (c) Energy-dispersive X-ray (EDX) spectra of the silicon needle and the silicon substrate.