Table 1. Summary of the system parameters for DOS-DCS measurements.
| Parameter | Contact system | Non-contact system | |
|---|---|---|---|
|
| |||
| Used | Used | Max. or Min. Allowed | |
|
| |||
| DOS systems description | |||
| Independent bandwidth (nm) | 610 - 900 | 610 - 900 | 550 - 1050 |
| Wavelength resolution (nm) | 5 | 5 | 5 |
| Optical Resolution (OR) (µm) | — | 200 | 74 |
| Source-detector separation (mm) | 2 - 5 | 2 - 5 | † |
| # of source-detector pairs | 6 | 12 | 57 @ 60% contrast |
| Dynamic range (dB) | 96 | 96 | 96 |
| Spot size on the object (mm) | 0.2 | <1 | — |
| Depth of focus (mm) | — | ± 4 | ± 4 |
| Field of view (mm) | — | ≈45x20 | ‡ |
| Scanning resolution (mm) | — | 2 | 0.2 |
| Integration time per frame (s) | 4 | 2 | >0.1 |
| DCS systems descriptions | |||
| Source wavelength (nm) | 785 | 785 | 785 |
| Source-detector separation (mm) | 2-5 | 2-7 | † |
| # of source-detector pairs | 6 | 4 | 4 |
| Integration time per frame (s) | 3 | 3 | >0.1 |
| DOS + DCS | |||
| Total time per frame, still (s) | 8 | 6 | 1 |
| Total time per frame, moving* (s) | 20 | 8 | 3 |
†: Dynamic parameter that depends on the system demagnification and optical path
‡: Dynamic parameter that depends on the sample size
*Probe replacement for contact system and translation for scanner system respectively