Table 1.
Performance characteristics of the custom-built multifunctional UV-lithography tool
| Characteristic | Minimum | Maximum |
|---|---|---|
| LED irradiance (mW/cm2) | 45.0 | 102.0 |
| Laser power (mW) | 0.18 | 1.00 |
| Imprinting load (kg) | 0.10 | High (not measured) |
| Length displacement (mm) | 0.001 | 390.000a |
| Breadth displacement (mm) | 0.001 | 290.000a |
| Head speed (mm/s) | 0.001 | 25.000 |
| Working temperature (°C) | Room Temperature | 150 |
aAlthough the CNC head may displace to the tabulated maximum, with the documented hotplate functioning as the substrate mount, the displacement is limited to the mount area of 150 mm square