Table 2.

Comparison of the converted CNC machine criteria to purposely built commercial counterparts (data for which was determined from official data sheets; Suss power density was given for the discrete wavelength, whereas EVG was approximated for broadband spectrum range 300–500 nm)

Model	Custom tool	Suss MA/BA6	EVG 770 NIL Stepper
Price	$	$$$$	$$$$$
Power density (mW/cm2) @ 365 nm	102.0	7.1	~20.0
Desktop unit	Yes	No	No
X/Y accuracy (μm)	<50.0	0.5	0.5
Optical alignment	No	Yes	Yes
Maximum substrate (mm)	390	150	300
Active force control	Yes	No	Yes
Imprint environment	Air	Air	Vacuum/inert gas
Temperature control	Yes	No	No
Laser lithography	Yes	No	No