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10B4C film composition with progressing film depth from the surface as obtained from relevant XPS core-level spectra. The error on the composition never exceeds ±2%. As explained in the text, the 11B percentage is kept fixed.
| depth (nm) | 10B (At.%) | 11B (At.%) | C (At.%) | O (At.%) |
|---|---|---|---|---|
| 0 | 38.2 | 1.5 | 41.5 | 18.8 |
| 5 | 75.8 | 1.5 | 19.6 | 3.1 |
| ≥10 | 77.3 | 1.5 | 19.3 | 1.9 |
