Table 2.

Scattering length density (N_b) of the sputtered ¹⁰B₄C layer calculated according to the depth and the composition given in table 1. The minimum and the maximum values are calculated according to the range of the layer mass density.

depth (nm)	$min{N}_b$ (10−6 Å−2)	$max{N}_b$ (10−6 Å−2)
0	4.72−0.49 i	4.92−0.51 i
5	2.06−1.10 i	2.14−1.14 i
≥10	1.95−1.13 i	2.03−1.17 i