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. 2016 Mar 14;6:23039. doi: 10.1038/srep23039

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The O 1 s peaks of XPS analysis in a-IGZO channel layer under different conditions (a) no activation, (b) N₂ 4 MPa at 100 °C, and (c) O₂ 2 MPa at 100 °C. (d) Area ratio of M-O and M-O_vac in each condition.