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. 2016 Mar 14;6:23039. doi: 10.1038/srep23039

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(a–c) Imaginary part of SE spectra absorption coefficient, (d–f) XPS spectra near the valence band and (g) band alignment of a-IGZO channel layer under different conditions: no activation, O₂ 2 MPa at 100 °C, and N₂ 4 MPa at 100 °C.