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. 2016 Mar 15;6:22664. doi: 10.1038/srep22664

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(A) FESEM images of EUV exposed nanowaves and nanoboates; (B) Higher magnification images (magnification: 120 k) of nanowaves; (C) Higher magnification images (magnification: 120 k) of nanowaves and nanoboats. (EUV dose 88.19 mJ/cm²).