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. 2016 Mar 15;6:22664. doi: 10.1038/srep22664

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(A) FESEM images of EUV exposed nanopillars; (B) 3-D view of AFM images of nanopillars; (C) FESEM images of star-elbow features; (D) 3-D view of AFM images of star-elbow features. (EUV dose 88.19 mJ/cm²).