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Deposition efficiency of polydisperse spherical Ag in three of the NACIVT wells
| Well | Area | E SEM (% ± std) |
|---|---|---|
| 6 | 1 | 55 ± 3 |
| 2 | 27 ± 3 | |
| 3 | 43 ± 1 | |
| 4 | 48 ± 2 | |
| 5 | 11 ± 3 | |
| 18 | – | 17 ± 4 |
| 24 | – | 52 ± 8 |
| Average | 36 ± 17 |
Well 6, divided and analyzed in five areas, three images in each area, shows some variability in efficiency over the wafer surface. Wells 18 and 24 show a deposition efficiency in the same range as well 6
