Table 2. Parameters of the 50 nm focusing two-stage KB optics.
| Upstream KB mirrors | Downstream KB mirrors | |||
|---|---|---|---|---|
| Horizontal focusing mirror | Vertical focusing mirror | Horizontal focusing mirror | Vertical focusing mirror | |
| Mirror shape | Elliptical cylinder | Elliptical cylinder | Elliptical cylinder | Elliptical cylinder |
| Substrate material | Quartz | Quartz | Quartz | Quartz |
| Coating | None | None | Platinum | Platinum |
| Substrate size | 400 × 50 × 50 mm | 400 × 50 × 50 mm | 500 × 50 × 50 mm | 465 × 50 × 50 mm |
| Grazing angle | 1.5 mrad | 1.5 mrad | 5.5 mrad | 5.0 mrad |
| Focal length | 6.070 m | 5.520 m | 1.115 m | 0.582 m |
| Distance from source | 120.45 m | 120 m | 72.247 m | 72.780 m |
| Semi-major axis | 63.26 m | 63.26 m | 36.68 m | 36.68 m |
| Semi-minor axis | 40.6 m | 42.0 m | 49.4 m | 32.6 m |