Table 1.
Dimensions of the topographic features of the substrates
Pitch (nm) | Ridge width (nm) | Groove width (nm) |
---|---|---|
400 | 70 | 330 |
800 | 250 | 550 |
1200 | 400 | 800 |
1600 | 650 | 950 |
2000 | 850 | 1150 |
4000 | 1900 | 2100 |
Groove depth: 600 nm.
Dimensions of the topographic features of the substrates
Pitch (nm) | Ridge width (nm) | Groove width (nm) |
---|---|---|
400 | 70 | 330 |
800 | 250 | 550 |
1200 | 400 | 800 |
1600 | 650 | 950 |
2000 | 850 | 1150 |
4000 | 1900 | 2100 |
Groove depth: 600 nm.