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. Author manuscript; available in PMC: 2016 Dec 1.
Published in final edited form as: J Microelectromech Syst. 2015 Nov 25;24(6):1840–1847. doi: 10.1109/JMEMS.2015.2444992

Fig. 12.

Fig. 12

(a) top: 4 degree of freedom aligner to move and align top and bottom electrodes, (b) bottom: backlight that is used for aligning top and bottom layers.