Skip to main content
. Author manuscript; available in PMC: 2016 Apr 15.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2016 Jan 25;15(1):doi:10.1117/1.JMM.15.1.014003.

Figure 1.

Figure 1

Raw CD-AFM profile of large-width VPS feature using PL2-NCHR. The tip width is approximately 2.1 μm near the plateau, and the taper of the rod has approximately 10° sidewalls.