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. Author manuscript; available in PMC: 2016 Apr 15.
Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2016 Jan 25;15(1):doi:10.1117/1.JMM.15.1.014003.

Figure 3.

Figure 3

Apparent bottom width of tip calibration structure as a function of lateral dither voltage. The value shown at 0 V (with square marker instead of diamond) is the average of six ‘no dither’ results obtained using FDTA (fast dither tube actuation) mode. The standard deviation of those six results is 0.2 nm but is too small to be visible on the scale. Note that the linear fit is only to the active dither results, but the extrapolation to zero agrees well with the FDTA result.