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Sample table of wafer fabrication parameters
| Layer number | 1 | 2 | 3 | 4 |
|---|---|---|---|---|
| Layer height (μm) | 0.4 | 1 | 3 | 10 |
| SU-8 formulation | 2000.5 | 2000.5 | 2002 | 2005 |
| Spin speed (rpm) | 3750 | 700 | 1000 | 660 |
| Soft-bake at 95 °C (s) | 120 | 120 | 150 | 240 |
| Exposure time (s) | 60 | 60 | 80 | 100 |
| Postexposure bake at 95 °C (s) | 160 | 160 | 180 | 240 |
