Table 14.10.
Photolithography Equipment, chemicals and supplies
| Equipment | Model No. | Manufacturer |
|---|---|---|
| Mask aligner | Model 200 | OAI |
| Spin processor | WS-400BZ-NPP-Lite | Laurell Technologies Corporation |
| Surface profilometer | Dektak 150 | Veeco |
| Infrared thermometer | 62 | Fluke |
| Hot plate | ||
| Fume hood | ||
|
| ||
| Chemicals and supplies | Part No. | Supplier |
|
| ||
| SU-8 Photoresists 2000. 5-2050 (500 ml) | Varies | MicroChem |
| SU-8 Developer (4 L) | Y020100-4000L1PE | MicroChem |
| SU-8 2000 Thinner (4 L) | G010100-4000L1PE | MicroChem |
| AlphaLite Polyster swab | 18-375 | Fisher Scientific |
| Glass bottle (amber) | 41265T31 | McMaster-Carr |
| Instant Adhensive | 495045 | Loctite |
| Borosilicate glass square, 3′×3′, 1/8″ thick | 8476K131 | McMaster-Carr |
| Silicon Wafer | 100MM/CZ/1-0-0/Boron/P Type/Resis-10-20/Thick 500-550/Oxy 9-21/SLBACK: ETCH ACID | WaferNet, Inc. |
| Wafer tray | H20-3000-01-1415 | Entegris, Inc. |
| Wafer cover | H20-3000-02-1216 | Entegris, Inc. |
| Wafer tweezers (125 mm) | S3WF | SPI Supplies |
| Crystallizing Dish (740 ml) | 08-741E | Fisher Scientific |
| Wash bottles (500 ml) Acetone | 08-647-707 | Fisher Scientific |
| DI Water | Milli-Q or better | |
| Isopropanol | HPLC grade | |
| Methanol | HPLC grade | |