Table 14.7.
SU-8 2000 photoresists formulations
SU-8 2000 | % Solids | Viscosity (cSt) |
---|---|---|
2000.5 | 14.3 | 2.49 |
2002 | 29.00 | 7.5 |
2005 | 45.00 | 45 |
2007 | 52.50 | 140 |
2010 | 58.00 | 380 |
2015 | 63.45 | 1250 |
2025 | 68.55 | 4500 |
2035 | 69.95 | 7000 |
2050 | 71.65 | 12,900 |
2075 | 73.45 | 22,000 |
2100 | 75.00 | 45,000 |
2150 | 76.75 | 80,000 |