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. Author manuscript; available in PMC: 2016 Apr 19.
Published in final edited form as: Methods Enzymol. 2011;497:295–372. doi: 10.1016/B978-0-12-385075-1.00014-7

Table 14.7.

SU-8 2000 photoresists formulations

SU-8 2000 % Solids Viscosity (cSt)
2000.5 14.3 2.49
2002 29.00 7.5
2005 45.00 45
2007 52.50 140
2010 58.00 380
2015 63.45 1250
2025 68.55 4500
2035 69.95 7000
2050 71.65 12,900
2075 73.45 22,000
2100 75.00 45,000
2150 76.75 80,000
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