Table 1.

Model parameters used in the simulation models.

Parameters	Value	Parameters	Value
Sense-mode mass	1.3738 × 10−6 Kg	Structural thickness	60 µm
Structure type	Type A/Type B	Sense-mode Q	100
Stiffness imbalance	0.97%/1.83%	Common acceleration	9.8 m/s2
Springs stiffness k	748.5 N/m	Stiffness difference ratio ηa/ηb	11.80/0.73