Table 3.
Type | Type A | Type B | |||||
---|---|---|---|---|---|---|---|
ε | Theoretical Value | Simulation Value | Error Rate | Theoretical Value | Simulation Value | Error Rate | |
In-phase displacement difference (µm) | 0.97% | 0.000425 | 0.000456 | 7.33% | 0.0410 | 0.0444 | 8.20% |
1.83% | 0.000802 | 0.000853 | 6.40% | 0.0773 | 0.0832 | 7.62% | |
Anti-phase displacement difference (µm) | 0.97% | 0.00184 | 0.00199 | 7.89% | 0.0314 | 0.0340 | 8.17% |
1.83% | 0.00347 | 0.00372 | 7.08% | 0.0592 | 0.0636 | 7.35% |