Skip to main content
. 2016 Apr 12;16(4):526. doi: 10.3390/s16040526

Figure 6.

Figure 6

S11 parameters of the AlN/TC4 SAW devices. The thicknesses of the AlN films are 1.5 μm, 2.0 μm, 2.5 μm, 3.0 μm, and 3.5 μm, respectively.