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The material parameters used in the simulation.
| Material | AlN [6] | Ti *[7] | |
|---|---|---|---|
| density(kg/m3) | 3260 | 4510 | |
| elastic constant (GPa) | C11 | 345 | 162.2 |
| C12 | 125 | 91.8 | |
| C13 | 120 | 69 | |
| C33 | 395 | 180.6 | |
| C44 | 118 | 46.7 | |
| C66 | 110 | 35.2 | |
| piezoelectric constant (c/m2) | e15 | −0.48 | … |
| e31 | −0.45 | … | |
| e33 | 1.55 | … | |
| relative permittivity | ε11 | 9 | … |
| ε33 | 11 | … | |
* We use the material parameter of Ti in the simulation because the material parameter of the Ti-6Al-4V (TC4) alloy is close to Ti.
