TABLE 1.
M1_NO | M1_O2 | M2_NO | M2_O1 | M2_O3 | |
---|---|---|---|---|---|
N. of obstacles | - | 2 | - | 1 | 3 |
W (μm) | 50 | 50 | 500 | 500 | 500 |
h (μm) | 25 | 25 | 200 | 200 | 200 |
L (mm) | 2.1 | 2.9 | 17.1 | 20.7 | 15.3 |
Wfeat (μm) | 12 | 15 | 84 | 370 | 113 |
Lfeat (mm) | 0.9 | 1.35 | 8.1 | 9.4 | 6.3 |
M1_NO | M1_O2 | M2_NO | M2_O1 | M2_O3 | |
---|---|---|---|---|---|
N. of obstacles | - | 2 | - | 1 | 3 |
W (μm) | 50 | 50 | 500 | 500 | 500 |
h (μm) | 25 | 25 | 200 | 200 | 200 |
L (mm) | 2.1 | 2.9 | 17.1 | 20.7 | 15.3 |
Wfeat (μm) | 12 | 15 | 84 | 370 | 113 |
Lfeat (mm) | 0.9 | 1.35 | 8.1 | 9.4 | 6.3 |