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The mirror width profiles were optimized for operation at 8 mrad. The silicon substrates were oriented such that the reflecting faces were parallel to crystal plane (110) with the [001] axis aligned along the mirror.
| Glancing angle | RMS slope error (µrad) | |||
|---|---|---|---|---|
| θ (mrad) | e ph (keV) | KB mirror | FEA | Measured |
| 5.6 | 25 | VFM | 0.06 | 0.06 |
| HFM | 0.11 | 0.11 | ||
| 8 | 17 | VFM | 0.08 | 0.09 |
| HFM | 0.13 | 0.15 | ||
| 10.7 | 13 | VFM | 0.12 | |
| HFM | 0.17 | |||
