Table 3. Calculated slope errors in RMS with different crystal plane and orientation using the mirror width profile optimized for the Si(110) plane and mirror axis [001].

	Si_hkl	Angle (°)	F 1 (N)	F 2 (N)	E x (GPa)	RMS (µrad)	S max (MPa)
Profile optimized for Si(110) plane, axis [001], fixed bending forces F 1 and F 2	110	0	16.00	16.00	130	0.09	42.5
	110	55	16.00	16.00	188	162	43.0
	110	90	16.00	16.00	169	123	45.1
	100	0	16.00	16.00	130	0.37	41.6
	111	0	16.00	16.00	169	121	41.8
Profile optimized for Si (110) plane, axis [001], optimized forces F 1 and F 2	110	0	16.00	16.00	130	0.09	42.5
	110	55	21.39	21.40	188	0.50	59.2
	110	90	19.97	19.54	169	0.18	56.2
	100	0	16.00	16.02	130	0.22	41.6
	111	0	19.72	19.64	169	0.24	52.5