Table 4. Calculated slope errors in RMS with different crystal plane and orientation using the mirror width profile optimized with isotropic material properties.

	Si_hkl	Angle (°)	F 1 (N)	F 2 (N)	E x (GPa)	RMS (µrad)	S max (MPa)
Profile optimized for E = 112.4, ν = 0.28, fixed bending forces F 1 and F 2	110	0	16.00	16.00	130	75	34.0
	110	55	16.00	16.00	188	217	40.5
	110	90	16.00	16.00	169	184	37.5
	100	0	16.00	16.00	130	75	33.8
	111	0	16.00	16.00	169	181	39.0
Profile optimized for E = 112.4, ν = 0.28, optimized forces F 1 and F 2	10	0	18.17	17.97	130	0.12	38.7
	110	55	24.37	24.21	188	0.54	63.7
	110	90	22.84	22.06	169	0.24	53.5
	100	0	18.15	18.01	130	0.26	38.6
	111	0	22.48	22.16	169	0.23	55.8