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. 2016 May 16;6:26032. doi: 10.1038/srep26032

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Copyright © 2016, Macmillan Publishers Limited

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Profilometry images of positive resist mold before (a) and after (b–d) hardbake. Patterns in AZ 50XT resist were fabricated from metal masks presenting lines with 100 (a–c) and 500 μm width (d). Micrographies show PDMS substrate (in top), glass coverslip (in middle of stack), and PDMS cover (in bottom side) at regions with (e) and without (f) channel.