Table 1. Intrinsic and loaded quality factors of different types of microresonators.

Microresonator type	loaded Q	intrinsic Q
Single-mode waveguide with a uniform width of 1 μm	0.6 M	0.83 M
Multi-mode waveguide with a uniform width of 2 μm	1.1 M	1.56 M
Single-mode waveguide with varying widths from 1 to 2 μm	1.0 M	1.36 M

For a fair comparison, all other parameters of the microresonators are kept the same.