Figure 1. HEXRD and ABED experiments of amorphous SiO.

(a) X-ray total structure factors S(Q) of amorphous SiO, Si and SiO₂. The X-ray S(Q) of amorphous SiO obtained from HEXRD (red) is shown together with the S(Q) data of amorphous Si (black) and SiO₂ (orange) reported in the refs ¹⁵ and 19¹⁹, respectively. The S(Q) profile for the summation of amorphous Si and SiO₂ is shown as a blue curve. The dotted line is a guide to the eyes. The weighting factors of Si–Si, Si–O and O–O pairs for X-rays used in the RMC modelling are plotted in Supplementary Fig. 10, together with those for electrons. (b) The schematic diagram of the ABED measurements of amorphous SiO with nanoscale structural heterogeneity. Nano-regions indicated by yellow colour are structurally different from those indicated by blue colour. Diffraction patterns from yellow and blue nano-regions, and also their interface can be acquired by using ABED technique.