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. 2016 May 19;6:26452. doi: 10.1038/srep26452

Figure 1. Structure and design of the THz modulator based on metamaterials integrated with metal-semiconductor-metal varactors.

Figure 1

(a) Schematic of the MSM-2DEG varactor. (b) C-V characteristics of MSM-2DEG varactor. (c) Schematic view of a metamaterial unit cell. Grey areas represent the active region. The varactor gate electrodes are shown in black. The first metal layer (brown) forms split ring and the bottom electrode of the MIM capacitors while the second metal layer (yellow) forms the top electrode of the MIM capacitors. (d) Equivalent circuit corresponding to the metamaterial unit cell. (e) Schematic view of the complete device containing 1122 unit cells and the bias pads. Polarization of the incident beam is also indicted. (f) Simulated transmittance at the bias voltages of 0 and 3 V.