Table 1.
Geometric channel dimensions (unit: μm).
| L11 (L14) | L12 (L15) | W12 | W13 | L13 | W2 | L2 | H | |
|---|---|---|---|---|---|---|---|---|
| Design 1 | 10 | 5 | 5 | 25 | 50 | 25 | 805 | 15 or 25 |
| Design 2 | 6 | 3 | 3 | 15 | 48 | 15 | 761 | 15 or 25 |
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