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. 2016 May 17;6:26040. doi: 10.1038/srep26040

Figure 1. Characterization of AlN film grown on c-plane sapphire.

Figure 1

(a) X-ray 2θ/ω scan of AlN thick film; (b) Cross-sectional TEM image of AlN thick film, which contains the sawtooth layer and the columnar layer; (c) SAED pattern taken from the sawtooth layer of (b); (d,e) are the SAED patterns taken from the neighboring column A and B in (b), respectively.