Figure 6. Structural characteristics of 5 × 1015 He/cm2 dosed SRO film after annealing for 1 h at 750 °C.

(a) XRD 2θ-θ scan around the (002)pc reflection before and after anneal shows that the c-axis has returned toward the as-grown undosed length. (b) RSMs around the {103}pc reflections after anneal demonstrates a return to orthorhombic character with octahedral tilts clearly visible. For comparison, see Fig. 2 for RSMs from the film before thermal annealing.